Computer Aided Ultra-precision Micro-machining of Metallic Material
Yoshimi TAKEUCHI, Kiyoshi SAWADA and Toshio SATA
Proc. of IEEE Int. Conf. on Robotics and Automation, Nagoya (1995) 67-72
LEFT : human face-like surface defined by CAD
RIGHT : human face-like surface machined within the circular area of 3.0mm in diameter
Micro-machining technology is in general well known in the field of
lithography technique, where most of material to be used are brittle ones
such as silicon-oxide. From now on, however, the requirement of producing
micro-machine and/or micro-mechanism with metal materials will be increased
since a variety of workpiece configurations can be easily made.
Thus, the study deals with the micro-machining of metal workpieces with
sculptured surface by use of an ultra-precision milling machine newly developed.
The lathe-type ultra-precision milling machine, consisting of
z-motion table,positionable spindle on it as c-rotational axis and x-motion
table, is equipped with a pseudo-ball-endmill composed of a single crystal
diamond tool mounted at the top of high speed air spindle on x- table.
A control program is developed to carry out 3-axis control micro-machining.
3-axis control program enables the tool to produce a human face-like surface
with the surface roughness of 77 nm(Rmax) within the circular area of 3 mm in
diameter.
As a result, the possibility of generating ultra-precision
sculptured surface of metal workpieces is experimentally confirmed.
[Takeuchi Lab. Home Page (in English)]
[Takeuchi Lab. Home Page (in Japanese)]
1996/11/14, by T.Ishida