Ultraprecision 3D Micromachining of Glass
Yoshimi TAKEUCHI,Kiyoshi SAWADA, and Toshio SATA
Annals of CIRP,vol.45/1 (1996) 401-404
It has been theoretically and experimentally confirmed that brittle
materials can be machined in the ductile mode under the certain small depth
of cut. However, it is extremely difficult to obtain tiny 3D workpiece
shapes of brittle materials with high surface accuracy. The study deals
with the ultraprecision 3D micromachining of glass workpiece by means of a
lathe-type ultraprecision milling machine and pseudo ballend mills. As a
result, it is possible to obtain a glass mask of 1 mm in diameter with the
surface roughness of 50 nm.
Keywords: Ultraprecision, Micromachining, Brittle material
[a glass mask of 1 mm in diameter with the surface roughness of 50 nm]
[Takeuchi Lab. Home Page]
1996/11/12, by Y.Sakaida