Improvement of Ultraprecision Micromachining Accuracy
by Means of High Precision Tool Chucking System
Kiyoshi Sawada, Yoshimi Takeuchi, Toshio Sata
Proceedings of the International Seminar on Improving Machine Tool Performance, pp.599-606.
(San Sebastian, Spain, July 6-8, 1998)
The study deals with the improvement of ultraprecision micromachining
technology by devising a tool chuck mechanism. A lathe-type ultraprecision
milling machine equipped with an improved pseudo ball end mill as a cutting
tool was designed to create tiny parts with nm-order surface roughness.
The dimensional accuracy and surface roughness of workpieces are
significantly influenced by the rotational accuracy of pseudo ball end
mills, which are mounted to the spindle by a chucking mechanism. To meet
the requirement, a new chucking mechanism was devised as a substitute of a
three-jaw type chuck to improve the setting repeatability of the tool. The
chucking mechanism enables the tool to be positioned within the range of
0.2 mm. As a result, the ultraprecision milling machine with the chucking
mechanism and the tool was able to produce a traditional Noh mask on a
copper surface of 1 mm in diameter with the surface roughness of 58 nm (p-v
value). In addition, it is found that the contour line pattern observed on
the mask surface is due to 3-dimensional cutter mark.
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